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CAS NO:
1590-87-0
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Shanghai Wechem Technology Limited
1
Years
Standard Member
Basic Info
Grade
Pharmaceutical Grade
Is Manufacturer
YES
Payment Method
L/L
Samples Provided
NO
Product Description
| Specifications | |
| Purity | 99.998 |
| Oxygen + Argon | ≤1 ppmv |
| Nitrogen | ≤1 ppmv |
| Carbon Monoxde | ≤1 ppmv |
| Carbon Dioxide | ≤1 ppmv |
| THC as CH4 | ≤1 ppmv |
| TCS ( Total Chlorosilanes ) | ≤ 0.2 ppmv |
| Higher silane | ≤ 50 ppmv |
| Silane | ≤ 200 ppmv |
| Water | ≤ 1 ppmv |
| Ship | |
| DOT Shipping Name | Compressed Gas Flammable, NOS ( Disilane ) |
| DOT Classification | 2.1 ( Flammable Gas ) |
| DOT Label | Flammable Gas |
| UN Number | UN 1954 |
| CAS No. | 1590-87-0 |
| CGA/DISS/JIS | 350/632/W22-14L |
| Shipped as | LiquefiedGas |
| Technical Information | |
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | 2-98% |
| Auto Ignition Temperature (°C ) | -100 |
| Molecular Weight (g/mol) | 62.22 |
| Specific gravity (air =1) | 2.1 |
| Critical Temperature ( °C ) | 150.85 |
| Critical Pressure ( psig ) | 747 |
| Applications | |
| .Mainly used for miniaturization semiconductors manufacturing process in the high spedd and low temperature deposition of uniform thin films . .The core applicitons such as process below 20nm node IC semiconductors , advanced memory chips ( DRAM/NAND Flash ), also used in gas mixture for HIT solar cells , LTPS TFT/LCD display panels , and LED . | |
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