Nitrogen Trifluoride

IC: As perfluorocarbon (PFC), which is a gas cleaning agent in the semiconductor industry, is harmful to the environment, it has gradually been replaced by nitrogen trifluoride (NF3) in recent years. Using NF3 as a chemical vapor deposition (CVD) tank cleaning agent, compared with perfluorocarbons, can reduce pollutant emissions by about 90%, and can significantly increase the cleaning speed, which can increase the cleaning equipment capacity by about 30%.
For LCD: NF3 can also be used as an etchant and also used in the processing of liquid crystal displays (LCD). For this reason, the demand for NF3 has increased sharply in recent years.
Solar cells: NF3 is also widely used as an etching and cleaning gas in the solar cell manufacturing industry.