Spectropur Pressure control planels MP2

Name: Spectropur Pressure control planels MP2
Availability: spectropur-pressure-control-planels-mp2-214293.html

Category:Fluid Equipment > Valves
Product Name:Spectropur Pressure control planels MP2
Price(USD):0.00
Company:Spectron Gas Control Systems (Shanghai) Co.,Ltd.

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Product features

Pressure control panels for semiconductor gases from quality 6.0
Waste gas valve
Manual (pneumatic) process gas (EMO-) valve
Purge gas valve
Check valve to prevent process gas from flowing back into the puge gas line
Pre-filter
Pressure regulator
Burst disc
Filter for particle-free process gas supply
Process gas line shut-off valve
All gas-wetted parts made from stainless steel 1.4404 ESU as well as Hastelloy C and PCTFE
100 % helium-leak-tested
Assembly in cleanroom class ISO 5.0

Technical data
Materials Body: Diaphragm: Other gas wetted parts: Valve seat and stem:	stainless steel 1.4404 ESU (SS 316L remelted) Hastelloy C276 stainless steel 1.4404 ESU (SS 316L remelted) PCTFE
Surface roughness optional:	R_a ≤ 0,25 µm R_a ≤ 0,18 µm
Leak rate to atmosphere: via seat:	< 1 x 10^-9 mbar l/s He < 1 x 10^-6 mbar l/s He
C_v-value	0,24 (k_v = 0,2)
Temperature range	-20°C to +70°C

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