Trans-1,2-Dichloroethylene(DCE、TRANS-LC)-

Name Trans-1,2-Dichloroethylene/DCE/ TRANS-LC
Chemical formula C2H2Cl2
Relative molecular weight 96.94
CAS number 156-60-5
Physical and chemical properties Colorless liquid with slightly irritating odor, melting point -57°C, boiling point 48°C, density 1.265g/ml. Flammable, its vapor and air can form an explosive mixture. It can react with oxidants. Separate storage from acid and alkali.
Main use: High-purity chlorine source, mainly used to speed up the oxidation of silicon wafers and clean the furnace tube in the wafer manufacturing process. It is the electronic chemicals required by semiconductor, discrete devices, micro-electromechanical systems (MEMS), and photovoltaic manufacturing.
Product Standards:    
Item Standard Value Item Standard Value Standard Value
Purity 99.999995% (7.5N) Manganese (Mn) max 0.1ppb
Aluminum (Al) max 0.3ppb Sodium (Na) max 0.2ppb
Silver (Ag) max 0.1ppb Nickel (Ni) max 0.1ppb
Arsenic (As) max 0.1ppb Niobium (Nb) max 0.1ppb
Gold (Au) max 0.1ppb Phosphorus (P) max 1.0ppb
Boron (B) max 1.0ppb Lead (Pb) max 0.1ppb
Barium (Ba) max 0.1ppb Antimony (Sb) max 0.1ppb
Bismuth (Bi) max 0.1ppb Tin (Sn) max 0.1ppb
Calcium (Ca) max 0.8ppb Strontium (Sr) max 0.1ppb
Cadmium (Cd) max 0.1ppb Titanium (Ti) max 0.1ppb
Cobalt (Co) max 0.1ppb Zinc (Zn) max 0.2ppb
Copper (Cu) max 0.1ppb acidity max 5ppm
Chromium (Cr) max 0.1ppb Moisture max 20ppm
Iron (Fe) max 0.6ppb, the number of particles ≥0.1µm max 5p/ml
Gallium (Ga) max 0.1ppb, the number of particles ≥0.2µm max 3p/ml
Mercury (Hg) max 0.1ppb Particle number ≥0.5µm max 1p/ml
Potassium (K) max 0.2ppb Chroma ＜10APHA
Lithium (Li) max 0.1ppb Appearance Colorless transparent liquid
Magnesium (Mg) max 0.1ppb, shelf life 24 months
Packing method: Container: Quartz source bottle
Specification: 1500ml, 1000ml, 500ml, 400ml
Outer packaging: thick PVC plastic bag for container jacket, built-in sponge cushion in PE special box